ACTUATOR, OPTICAL REFLECTING ELEMENT, AND IMAGE FORMING DEVICE USING OPTICAL REFLECTING ELEMENT

摘要

An optical reflecting element (1) is provided with: a frame body (6); a drive unit (5) having one end thereof connected to the inside of the frame body; a movable unit (4) connected to the other end of the drive unit; a reflecting unit (2) that is provided on the surface of the movable unit; and an electrode that is provided on the movable unit. The drive unit is configured to oscillate the movable unit by being driven by drive signals. The electrode is configured to have inputted thereto high frequency signals at a frequency higher than that of the drive signals. The optical reflecting element is driven at a high speed and a large deflection angle, and adhesion of dust to the movable unit can be eliminated.