发明名称 |
FILM STICKING METHOD AND FILM STICKING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To adhere a film having flexibility to an annular frame member without any slack.SOLUTION: A film sticking device 22 has a plurality of pressing members 24 for applying force F in a direction toward the outside of a frame member 12 to a plurality of respective force application points 18 set in a first film area 16 overlapped on the frame member 12 of a film 10, and a loading member 26 for applying a load L in a direction toward the film 10 to each of the plurality of pressing members 24. Each of the pressing members 24 has a base part 28 for receiving the load L from the loading member 26, and a contact part 30 for being brought into contact with the force application point 18 to apply the force F to the force application point 18 by the load L. The pressing member 24 is disposed in a posture in which the contact part 30 is located at an outer side from the base part 28 in projection to a virtual plane perpendicular to the direction of the load L. |
申请公布号 |
JP2013254819(A) |
申请公布日期 |
2013.12.19 |
申请号 |
JP20120128969 |
申请日期 |
2012.06.06 |
申请人 |
THREE M INNOVATIVE PROPERTIES CO |
发明人 |
NAKAJIMA SHINYA;SAITO ICHITA |
分类号 |
H01L21/683;H01L21/301 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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