发明名称 FILM STICKING METHOD AND FILM STICKING DEVICE
摘要 PROBLEM TO BE SOLVED: To adhere a film having flexibility to an annular frame member without any slack.SOLUTION: A film sticking device 22 has a plurality of pressing members 24 for applying force F in a direction toward the outside of a frame member 12 to a plurality of respective force application points 18 set in a first film area 16 overlapped on the frame member 12 of a film 10, and a loading member 26 for applying a load L in a direction toward the film 10 to each of the plurality of pressing members 24. Each of the pressing members 24 has a base part 28 for receiving the load L from the loading member 26, and a contact part 30 for being brought into contact with the force application point 18 to apply the force F to the force application point 18 by the load L. The pressing member 24 is disposed in a posture in which the contact part 30 is located at an outer side from the base part 28 in projection to a virtual plane perpendicular to the direction of the load L.
申请公布号 JP2013254819(A) 申请公布日期 2013.12.19
申请号 JP20120128969 申请日期 2012.06.06
申请人 THREE M INNOVATIVE PROPERTIES CO 发明人 NAKAJIMA SHINYA;SAITO ICHITA
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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