METHOD FOR RECYCLING ORGANIC RUTHENIUM COMPOUND FOR CHEMICAL VAPOR DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a method for recycling an organic ruthenium compound for chemical vapor deposition, which can cope with relatively new organic ruthenium compound developed recent years.SOLUTION: There is provided a method for recycling an organic ruthenium compound for chemical vapor deposition by extracting an unreacted organic ruthenium compound from a used starting material subjected to a thin film formation process, comprising the following (a) to (c) steps. (a) A modification step of bringing the used starting material into contact with a hydrogenation catalyst in a hydrogen atmosphere, to hydrogenate the oxidized organic ruthenium compound in the used starting material. (b) An adsorption step of bringing the used starting material into contact with an adsorbent to remove impurities in the used starting material. (c) A restoration step of heating the used starting material at a temperature higher than -100°C (inclusive) but lower than -10°C with respect to a decomposition temperature of the organic ruthenium compound for 8 hours or more, thereby adjusting the ratio of isomers of the organic ruthenium compound in the used starting material.