| 摘要 |
A measurement apparatus including a convergence unit for converging the electromagnetic wave to the object; a detection unit for detecting electromagnetic waves from the object; and an adjustment unit for adjusting a relative position between the object and the convergence position set by the convergence unit in a detecting region selected by using interval information about an interval between a first electromagnetic wave from the first reflecting surface and a second electromagnetic wave from the second reflecting surface, the first and second electromagnetic waves being acquired by using a detection result of the detection unit, in which the detecting region is a region in which a measurement position of the object at the time of detecting electromagnetic waves from the object is determined based on relative position information selected from and by using a plurality of pieces of information on the relative position corresponding to the interval information. |
