| 摘要 |
<p>The present invention relates to a heat treatment system for a thin film for a solar cell, and the heat treatment system for a thin film for a solar cell, according to the present invention, comprises: a chamber for forming an accommodation space; a casing for forming a sealed space in which a substrate is disposed; a lamp for applying heat to the substrate; and a spraying unit for spraying reaction gas into the sealed space. Thus, the present invention provides the heat treatment system for a thin film for a solar cell, which can uniformly spray reaction gas into the sealed space and can uniformly apply heat, thereby minimizing the loss caused by the dispersion of the reaction gas and selenium.</p> |
| 申请人 |
SNU PRECISION CO., LTD.;YOO, SANG WOO;KIM, JOO WON;JEON, KWANG JIN;PARK, SANG HYUN;CHA, JAE JUNG |
发明人 |
YOO, SANG WOO;KIM, JOO WON;JEON, KWANG JIN;PARK, SANG HYUN;CHA, JAE JUNG |
