| 摘要 |
PROBLEM TO BE SOLVED: To provide a high brightness, a small virtual size, low aberrations, and good alignment, in an electron beam system.SOLUTION: A condenser lens arrangement (320) for an electron beam system is disclosed. The condenser lens arrangement includes: a magnetic condenser lens (321) adapted for generating a magnetic condenser lens field, the condenser lens having a symmetry axis (350); and a magnetic deflector (322) adapted for generating a magnetic deflector field. The magnetic deflector is configured so that the superposition of the magnetic condenser lens field and the magnetic deflector field results in an optical axis of the condenser lens arrangement being movable relative to the symmetry axis (350). Further, an electron beam optical system including a condenser lens arrangement and a method for moving a condenser lens are disclosed. |
