发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which the reliability is improved by preventing failure due to an end portion of a semiconductor layer provided in an island shape, and to provide a method of manufacturing the same.SOLUTION: A semiconductor device has a structure including an island-shaped semiconductor layer provided on a substrate, an insulating layer provided on one surface and side surfaces of the island-shaped semiconductor layer, and a gate electrode provided on the island-shaped semiconductor layer via the insulating layer. In the insulating layer provided in contact with the island-shaped semiconductor layer, the permittivity of the region in contact with the side surfaces of the island-shaped semiconductor layer is set to be small compared to the region on the one surface of the island-shaped semiconductor layer.
申请公布号 JP2013254979(A) 申请公布日期 2013.12.19
申请号 JP20130170387 申请日期 2013.08.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAWAKI KAZUKO;SASAGAWA SHINYA;SUZAWA HIDEOMI;YAMAZAKI SHUNPEI
分类号 H01L29/786;H01L21/8238;H01L27/092 主分类号 H01L29/786
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