A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.
申请公布号
WO2013188519(A1)
申请公布日期
2013.12.19
申请号
WO2013US45374
申请日期
2013.06.12
申请人
AXCELIS TECHNOLOGIES, INC.;LEE, WILLIAM DAVIS;HOYT, KEVIN;SHANNER, DAVID;BERINGER, JASON
发明人
LEE, WILLIAM DAVIS;HOYT, KEVIN;SHANNER, DAVID;BERINGER, JASON