发明名称
摘要 Herein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.
申请公布号 JP5371964(B2) 申请公布日期 2013.12.18
申请号 JP20100510106 申请日期 2009.04.27
申请人 发明人
分类号 C23C4/06;C22C21/00;C23C4/12;C23C14/00;C23C16/44;H01L21/205 主分类号 C23C4/06
代理机构 代理人
主权项
地址