发明名称 Device for interferential distance measurement
摘要 The device has a splitting portion which splits the light emitted from a light source beams into a measuring beam and reference radiation beam. A reference beam bundle interferes the superposition of measuring beam and reference radiation beam. A splitting grating is formed in a light source. The beam is emitted parallel to the surface of a measurement reflector in the direction of the splitting grating. The splitting grating is arranged perpendicular to the surface of the measurement reflector.
申请公布号 EP2674720(A1) 申请公布日期 2013.12.18
申请号 EP20130169449 申请日期 2013.05.28
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 HUBER, WALTER;JOERGER, RALPH;HOLZAPFEL, WOLFGANG
分类号 G01B9/02 主分类号 G01B9/02
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