| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas shielding film where the rise of water vapor transmittance due to bending is prevented. SOLUTION: The gas shielding film 100 includes: a resin film substrate 102; and an amorphous gallium oxide film 104 that is formed on the resin film substrate and containing hydrogen of 0.1-30 atom%. COPYRIGHT: (C)2011,JPO&INPIT |
