| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and simple light receiving element array which sufficiently reduces a leakage current between light receiving elements. SOLUTION: The light receiving element array has a light absorbing layer 3 formed on a conductivity type semiconductor substrate 2, and also has a plurality of diffusion regions 5 of the opposite conductivity type from the conductivity type semiconductor substrate 2 formed in a conductivity type semiconductor layer 4 provided right on the light absorbing layer 3. The light absorbing layer 3 has the same conductivity type as the conductivity type semiconductor substrate 2. Further, a back electrode 1 is formed on the conductivity type semiconductor substrate 2 by vapor deposition etc., and an insulating film 6 and a surface electrode 7 are formed on the conductivity type semiconductor layer 4. The light absorbing layer 3 is a conductivity type using an electron as a majority carrier, so a probability of recombination between an electron and a hole is high and holes to be spread and moved laterally in the light absorbing layer 3, greatly decrease with their distances. Holes reaching an adjacent light receiving element decrease, so that a leakage current to the adjacent light receiving element is suppressed. COPYRIGHT: (C)2010,JPO&INPIT |
