发明名称 Moving mechanism, electronic component transport device, electronic component inspection device
摘要 A moving mechanism includes a first moving body which is arranged to move in a first direction with respect to a support, a second moving body which is provided on an opposite side to the support through the first moving body, and is movable in a second direction intersecting the first direction with respect to the first moving body, and a first vibrating body which is arranged in the support and biased to press the moving body or is arranged in the first moving body and biased to press the support. A direction in which a first groove and a second groove face each other intersects a direction in which the support and the moving body face each other, and a biasing direction in which the first vibrating body is biased intersects the direction in which the first groove and the second groove face each other and the direction in which the support and the moving body face each other.
申请公布号 EP2674995(A1) 申请公布日期 2013.12.18
申请号 EP20130171416 申请日期 2013.06.11
申请人 SEIKO EPSON CORPORATION 发明人 NISHIMURA, YOSHITERU;MIYAZAWA, OSAMU
分类号 H01L41/09;H02N2/00;H02N2/02;H02N2/10 主分类号 H01L41/09
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