发明名称 |
ROLL TO ROLL APPARATUS FOR FORMING PATTERN AND ROLL TO ROLL METHOD FOR FORMING PATTERN |
摘要 |
<p>A roll to roll pattern forming device comprises; a pattern forming part witch transfers a substrate to one direction and located on the substrate between neighboring roll parts among multiple roll parts separated each other and forms a pattern on the substrate; an absorption part which is faced with the pattern forming part across the substrate and absorbs the substrate; a light irradiation part which is in neighborhoods with the pattern forming and irradiates the pattern with light; and a control part for controlling the roll part, the pattern forming part, the absorption part, and the light irradiation part so that the pattern is irradiated with the light. [Reference numerals] (600) Control part</p> |
申请公布号 |
KR101343010(B1) |
申请公布日期 |
2013.12.18 |
申请号 |
KR20120084553 |
申请日期 |
2012.08.01 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LIM, JUNG AH;SONG, YONG WON;HONG, JAE MIN |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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