发明名称 ROLL TO ROLL APPARATUS FOR FORMING PATTERN AND ROLL TO ROLL METHOD FOR FORMING PATTERN
摘要 <p>A roll to roll pattern forming device comprises; a pattern forming part witch transfers a substrate to one direction and located on the substrate between neighboring roll parts among multiple roll parts separated each other and forms a pattern on the substrate; an absorption part which is faced with the pattern forming part across the substrate and absorbs the substrate; a light irradiation part which is in neighborhoods with the pattern forming and irradiates the pattern with light; and a control part for controlling the roll part, the pattern forming part, the absorption part, and the light irradiation part so that the pattern is irradiated with the light. [Reference numerals] (600) Control part</p>
申请公布号 KR101343010(B1) 申请公布日期 2013.12.18
申请号 KR20120084553 申请日期 2012.08.01
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LIM, JUNG AH;SONG, YONG WON;HONG, JAE MIN
分类号 H01L21/027 主分类号 H01L21/027
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