发明名称
摘要 PROBLEM TO BE SOLVED: To provide a plating apparatus capable of maintaining the temperature of a plating liquid uniform, and a plating method.SOLUTION: An integrated control part 31 controls an outer tank heat controller 32 to heat water 22 to a preliminarily set second target temperature by an outer tank heater 11 so that the temperature of the plating liquid 21 is heated to be kept to a prescribed first target temperature during a preliminary heating time from a time before a prescribed time when the material 23 to be plated is immersed in the plating liquid 21 till a time when the material 23 to be plated is immersed in the plating liquid 21; controls an inner tank temperature controller 32 to heat the plating liquid 21 to a third target temperature to compensate the calorific value lost when the material 23 to be plated is immersed into the plating liquid 21 by an inner tank heater 12; controls the outer tank temperature controller 32 to heat the water 22 to the second target temperature by the outer tank heater 11 after the preliminary heating time; and controls the inner tank temperature controller 33 to heat the plating liquid 21 to the first target temperature by the inner tank heater 12.
申请公布号 JP5372620(B2) 申请公布日期 2013.12.18
申请号 JP20090155557 申请日期 2009.06.30
申请人 发明人
分类号 C23C18/31 主分类号 C23C18/31
代理机构 代理人
主权项
地址
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