| 摘要 |
PROBLEM TO BE SOLVED: To measure the permeation of steam caused by fine flaws in a barrier film at a high resolving power with respect to the position and distribution of the fine flaw. SOLUTION: A barrier film is formed on polyethylene terephthalate, a sample 7 having a membrane formed thereto on the side of the barrier film in the order of Ca and Al is prepared, water is injected on the bottom of the space S2 on the underside of a measuring cell 8, the measuring cell 8 held to an airtight state by a humidity adjusting pin 14 is put in a glove box 16 and the sample 7 is placed and fixed on a flange part 17 so that the barrier film is turned upside. The measuring cell 8 is fixed on the sample stage of an atomic force microscope 20, and a probe is allowed to fall on the surface of the Al layer 4 of the sample 7 to measure the surface shape of the Al layer. Next, the humidity-adjusting pin 14 of the measuring cell 8 is loosened to expose the surface of the resin base material 1 of the sample 7 to a high-humidity atmosphere and the surface shape of the same place as a dry state measured first by the atomic force microscope 20 is measured, after a fixed interval. COPYRIGHT: (C)2011,JPO&INPIT |
