发明名称 CHEMICAL BATH DEPOSITION APPARATUS AND SOLAR CELL MANUFACTURED BY THE SAME
摘要 The present invention relates to a device for fabricating a chemical bath deposition thin film and a solar cell fabricated by the same capable of determining the reusing of chemical, calculating an usable processing number and estimating the thin film thickness while deposition processing based on the state information of the chemical being monitored in real time. The present invention provides the device for fabricating the chemical bath deposition thin film and a solar cell fabricated by the same comprising a chemical reactor where a chemical reacting with a substrate is filled; a chemical measuring unit measuring the state information of the chemical filled at the inside of the chemical reactor; and a control unit estimating at least one of the reuse of the chemical, the additional reusable processing number of the chemical and a thin film thickness deposited on the substrate.
申请公布号 KR101342960(B1) 申请公布日期 2013.12.18
申请号 KR20120065846 申请日期 2012.06.19
申请人 DMS CO., LTD. 发明人 YEOM, KEONG TAE;SEO, BONG MIN;KIM, BYEONG GUK;LEE, JONG KWAN
分类号 H01L21/205;H01L21/20 主分类号 H01L21/205
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