| 摘要 |
PROBLEM TO BE SOLVED: To provide a static-pressure air bearing linear guide device which has a guide member capable of improving own-weight warpage even if the member is long in length and the size of a cross section becomes large, and can reduce manufacturing cost. SOLUTION: The static-pressure air bearing linear guide device comprises: the guide member 4 extending in the guide direction; a movable body 5 moving in the guide direction along the guide member; air bearings 13a to 13h for supporting and guiding the movable body by air. The guide member has a pair of guide members 4a, 4a in which long-length directions extend in parallel with the guide direction and a bottom plate guide member 4b which is connected to one end in the short-length direction orthogonal to the guide direction of pair of side plate members and extend along the guide direction, and is formed into a U-shape at the cross section. COPYRIGHT: (C)2012,JPO&INPIT |
