| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required to align electrodes of a substrate with probe pins of a prober frame. SOLUTION: The prober frame 7 provided for the inside of a main chamber 3 includes an imaging means 8 for alignment. By imaging an alignment mark 18 on a substrate by the imaging means 8, a position detection means 11 directly determines the positional relation of the prober frame 7 and the substrate 10. A stage control means 12 controls the movement of a stage on the basis of the positional relation and aligns the substrate 10 with the prober frame 7. COPYRIGHT: (C)2011,JPO&INPIT |
