发明名称 TWO-LAYERED COPPER-CLAD LAMINATE MATERIAL, AND METHOD FOR PRODUCING SAME
摘要 <p>A two-layered copper-clad laminate material, in which one surface or both surfaces of a polyimide film having a thickness of 12.5 to 50 µm is subjected to a modification treatment by means of a glow discharge plasma treatment in an oxygen gas atmosphere, and a copper layer having a thickness of 1 to 5 µm is formed by means of sputtering or electroplating on one surface or both surfaces of the polyimide film after the modification treatment; characterized in that the integrated intensity ratio of a C1S peak at 287 to 290 eV to a C1S peak at 283 to 287 eV, obtained by analyzing the photoelectron spectroscopy (XPS) spectra of the surface of the polyimide film after the plasma treatment, is within the range of 0.03 to 0.11. The present invention aims at discovering; as a consequence of performing surface characterization by subjecting the PI film surface to XPS analysis before and after the plasma treatment, and of evaluating the dissolution properties and adhesive strength of the PI film before and after the plasma treatment; a two-layered copper-clad laminate material that is ideal to be processed during a wet PI etching step, and a production method for said two-layered copper-clad laminate material.</p>
申请公布号 EP2674509(A1) 申请公布日期 2013.12.18
申请号 EP20120744532 申请日期 2012.01.25
申请人 JX NIPPON MINING & METALS CORPORATION 发明人 INAZUMI HAJIME;SAKAGUCHI KAZUHIKO;SASAKI SHINICHI
分类号 C23C14/02;B32B15/088;C23C14/14;C23C14/20;C23C28/00 主分类号 C23C14/02
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