| 摘要 |
In exposed areas, since a returned film is heated slowly, a temperature difference between the top and bottom of the film occurs, thereby, wrinkles are formed in the film and light is not emitted at a desired angle to the surface of the film. The exposure apparatus includes a return unit which returns a rectangular film, an exposure unit which exposes the film returned by the return unit using a mask, and a cooling unit which cools the film exposed by the exposure unit by air cooling or liquid cooling. [Reference numerals] (AA) Up;(BB) Down stream;(CC) Up stream;(DD) Down |
