Target object processing system and method of controlling the same

摘要

A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.