发明名称 |
Rheological fluids for particle removal |
摘要 |
Methods and apparatus for cleaning a substrate (e.g., wafer) in the fabrication of semiconductor devices utilizing electrorheological (ER) and magnetorheological (MR) fluids to remove contaminant residual particles from a surface of the substrate are provided. |
申请公布号 |
US8608857(B2) |
申请公布日期 |
2013.12.17 |
申请号 |
US201213616282 |
申请日期 |
2012.09.14 |
申请人 |
SINHA NISHANT;MICRON TECHNOLOGY, INC. |
发明人 |
SINHA NISHANT |
分类号 |
B08B3/10 |
主分类号 |
B08B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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