Elastic guided wave coupling resonator filter and associated manufacturing

摘要

An elastic guided acoustic wave coupling resonator filter includes a dielectric layer interposed between piezoelectric substrates, with interdigital transducers on each substrate generally positioned at an interface between the substrates and the dielectric layer. The interdigital transducers on one substrate are aligned with the transducers on the opposing substrate and include cascaded filter tracks. The cascaded orientation between the two filter tracks includes either a differential connection or a balanced connection. As a result, the interdigital transducers are electrically isolated yet acoustically coupled to each other.