发明名称 |
Yield prediction feedback for controlling an equipment engineering system |
摘要 |
A yield prediction is received by a run-to-run controller that includes an intra-process run-to-run control module that specifies process performance targets, wherein the yield prediction is associated with at least one of a manufacturing tool, a product or a process. The run-to-run control module adjusts first parameters associated with intra-process run-to-run control based on the yield prediction, wherein the first parameters include processing parameters of a process recipe. |
申请公布号 |
US8612043(B2) |
申请公布日期 |
2013.12.17 |
申请号 |
US20110986141 |
申请日期 |
2011.01.06 |
申请人 |
MOYNE JAMES;WARD NICHOLAS;STAFFORD RICHARD;APPLIED MATERIALS, INC. |
发明人 |
MOYNE JAMES;WARD NICHOLAS;STAFFORD RICHARD |
分类号 |
G05B19/418 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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