| 摘要 |
PURPOSE: A vision inspection apparatus with a pattern compensatory function is provided to improve the uniformity of pattern that is irradiated for the vision inspection. CONSTITUTION: A vision inspection apparatus with a pattern compensatory function includes a stage part (10), a projector part (20), a camera part (30), a vision processing unit (40), and a control unit (50). The stage part allows an inspection object to be seated. The projector part irradiates a pattern on the inspection object, and includes a light source part, a pattern generation unit, and a lens part. The camera part captures the pattern that is irradiated on the inspection object. The vision processing unit reads an image captured from the camera part, and determines whether the inspection object is defective or not. The control unit controls the configurations. |
