| 摘要 |
PURPOSE: An edge grip type pre-aligner with a buffer stage is provided to reduce manufacturing costs by omitting an actuator for driving. CONSTITUTION: A lifter(4) receives a wafer(3) from a transfer robot. A clamp-lever(6) is connected to a second driving unit enabling the rotation of the wafer. The clamp lever includes three clamp arms. The clamping structure is formed on a front end of each clamp arm to clamp the wafer. A buffer stage(5) maintains the wafer in a standby state. The buffer stage includes a detector comprising an infrared emitting sensor and a receiving sensor. The infrared emitting sensor detects a notch of the wafer. |
