| 摘要 |
PROBLEM TO BE SOLVED: To prevent fall of substrates or occurrence of chipping at transfer times on conveyors.SOLUTION: An apparatus includes: a first conveyor part and a second conveyor part having each rotating belt wound on a plurality of rollers in the state where substrates are placed thereon, which are arranged at an interval along a first direction which is a conveyance direction of the substrates; a scribing unit installed in the interval, for scribing the substrates; and a dancer roller unit including at least a first roller and a second roller between an upstream side second conveyor part positioned on the upstream side of the second conveyor part in the first direction and a downstream side second conveyor part positioned on the downstream side; wherein the first roller is positioned on the outside of the belt of the second conveyor part, and the second roller is positioned on the inside of the belt of the second conveyor part, and the first roller and the second roller are formed movably in each mutually reverse direction in a second direction crossing with the first direction, and the upstream side second conveyor part and the downstream side second conveyor part which are formed in a body can be put into each mutually different operation state. |
