| 摘要 |
PROBLEM TO BE SOLVED: To provide an axis alignment method for a charged particle beam capable of easily performing axis alignment of the charged particle beam.SOLUTION: An axis alignment method for a charged particle beam in a charged particle beam device comprising astigmatism correction lenses having a first pair of coils constituted of a first coil and a second coil that are opposite to each other via an axis of the charged particle beam and have magnetic poles of coil surfaces opposite to each other being first poles and a second pair of coils constituted of a third coil and a fourth coil that are opposite to each other via the axis of the charged particle beam from a direction different from that of the first pair of coils and have magnetic poles of coil surfaces opposite to each other being second poles different from the first poles, the axis alignment method for the charged particle beam includes; a step S10 of changing currents flowing through the first through fourth coils to those of first through sixth conditions and acquiring first through sixth image data; and steps S11 through S13 of calculating respective current values of the first through fourth coils for correcting a position of the axis of the charged particle beam on the basis of the first through sixth image data. |
