发明名称 |
PURGE NOZZLE UNIT, PURGE APPARATUS AND LOAD PORT |
摘要 |
A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30. |
申请公布号 |
US2013326841(A1) |
申请公布日期 |
2013.12.12 |
申请号 |
US201313762991 |
申请日期 |
2013.02.08 |
申请人 |
SINFONIA TECHNOLOGY CO., LTD. |
发明人 |
NATSUME MITSUO;SUZUKI ATSUSHI |
分类号 |
B08B9/093 |
主分类号 |
B08B9/093 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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