发明名称 PROCESSED WASTE LIQUID PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processed waste liquid processing device capable of generating fresh water by separating silicon particulates from a processed waste liquid containing the silicon particulates as sawdust and grinding chips, and efficiently collecting the silicon particulates.SOLUTION: The processed waste liquid processing device for dividing a processed waste liquid mixed with silicon particulates into the silicon particulates and fresh water includes a waste liquid processing tank provided with a processed waste liquid inflow port communicated with processed waste liquid supply means at the bottom, cathode means provided in the waste liquid processing tank to be charged to minus, anode means provided facing the cathode means to be charged to plus, and fresh water suction means provided at an upper part of the cathode means to suck fresh water.
申请公布号 JP2013251435(A) 申请公布日期 2013.12.12
申请号 JP20120125912 申请日期 2012.06.01
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHIDA MIKI;ISHIGURO HIROTAKA;FUJITA ATSUSHI
分类号 H01L21/304;B24B55/12 主分类号 H01L21/304
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