NANO-IMPRINT MOLD AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a nano-imprint mold which has excellent dimensional accuracy of an irregular part of the nano-imprint mold including a fine irregular pattern and reduces the mold manufacturing costs, and to provide a manufacturing method of the nano-imprint mold.SOLUTION: A manufacturing method of a nano-imprint mold includes: a process where a substrate having a first main surface part formed by a plane surface is prepared; a resist pattern formation process where a protruding resist body is formed into a predetermined pattern on the first main surface part of the substrate directly or through an intermediate film; and a film part formation process where a coating film is deposited so as to cover a side surface and an upper surface of the protruding resist body, and the first main surface part of the substrate or an upper surface of the intermediate film.