| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL device manufacturing device by which conveyance of a substrate can be conducted with the deposition surface up in a vacuum with a simple mechanism, and vapor deposition can be made with high definition even in the conveyance with the deposition surface up, a manufacturing method thereof, a film forming apparatus or a film forming method.SOLUTION: A substrate is conveyed in a vacuum with its vapor deposition surface up, and at least when the substrate moves, the conveyance surface of the substrate is held so as not to slide. The substrate is delivered in the vacuum chamber, and then the substrate is erected vertically or roughly vertically for vapor deposition. A plurality of the substrates that have been conveyed with the vapor deposition surface up are subjected to vapor deposition in one vacuum vapor deposition chamber alternately with the same vapor deposition source. |
