| 摘要 |
PROBLEM TO BE SOLVED: To reflect infrared rays to prevent a temperature rise of a condensation surface, thus achieving uniformity of drying.SOLUTION: A drying device 1 for a coating film having a condensation plate 11 faced to a coating film f2 on a substrate f1, and condensing vapor of a solvent from the coating film f2 by the condensation plate 11, for drying, has a heating device 12 emitting infrared rays to heat the substrate f1, and the condensation plate 11 is formed with an infrared ray reflection film 13 on a condensation surface 11a, and has a reflectance of 98% or more for infrared rays having wavelengths in a range of 3.0 to 8.0 μm. |
