| 摘要 |
PROBLEM TO BE SOLVED: To improve a spatial resolution of a probe.SOLUTION: A probe comprises shield layers 2 and 3 which are provided on front and rear sides of an insulating layer 1, electric field output signal wiring 4 provided in an inner layer of the insulating layer 1, and an electric field sensor electrode 5 connected to one end portion of the wiring 4. The electric field sensor electrode 5 is held between shield layers 2 and 3, and is also held between side shield layers 8 and 9, the side shield layers 8 and 9 provided in the inner layer of the insulating layer 1 while being spaced apart from the electric field sensor electrode 5, and connected to the shield layers 2 and 3. Shieldability of the electric field sensor electrode 5 is improved and a spatial resolution of the probe is improved. |
