| 摘要 |
1. Apparatus for ascertaining orientation errors for structures (6) that have been put onto or are present on a substrate (5), having the following features: - a substrate holder (2) for holding the substrate (5) with the structures (6) - detection means for detecting X-Y positions of first markers (7) on the substrate (5) and/or second markers (11, 11') on the structures (6) by moving the substrate (5) or the detection means in a first coordinate system, characterized in that structure positions for the structures (6) are prescribed in a second coordinate system X'-Y', which is independent of the first coordinate system, the respective distance of said structure positions from the X-Y positions of the first markers (7) and/or the second markers (11, 11') being able to be ascertained by the apparatus. |
