发明名称 MEMS OPTICAL SENSOR
摘要 The present invention relates to an all-optical sensor utilizing effective index modulation of a waveguide and detection of a wavelength shift of reflected light and a force sensing system accommodating said optical sensor. One embodiment of the invention relates to a sensor system comprising at least one multimode light source, one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector, at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more multimode sensor optical waveguides, a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguides, and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light.
申请公布号 CA2875925(A1) 申请公布日期 2013.12.12
申请号 CA20132875925 申请日期 2013.06.06
申请人 TECHNICAL UNIVERSITY OF DENMARK 发明人 RECK, KASPER;OSTERGAARD, CHRISTIAN;HANSEN, OLE;THOMSEN, ERIK VILAIN
分类号 G01L11/02;G01L1/24 主分类号 G01L11/02
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