METHOD FOR THE PRODUCTION OF MICROMECHANICAL PARTS THAT ARE DIFFICULT TO REPRODUCE, AND RESULTING MICROMECHANICAL PARTS

摘要

The invention relates to a method for the production of a part, comprising the following steps: a) deposition of a diffractive layer on a substrate; b) deposition of a first photosensitive resin layer on the diffractive layer; c) illumination of the first photosensitive resin layer through a first photomask, such as to selectively remove portions of the photosensitive resin; d) etching of the diffractive layer in the areas not covered by the photosensitive resin; e) removal of the first photosensitive resin layer; f) deposition of a conductive layer on top of the substrate, on top of the remaining diffractive layer portions; g) deposition of a second photosensitive resin layer; h) illumination of the photosensitive resin layer through a second photomask, such as to selectively remove portions of the second photosensitive resin layer; i) electroforming-based deposition on top of the conductive layer between the remaining portions of the second photosensitive resin; j) release of the part by removal of at least the photosensitive resin.