METHOD FOR CLEANING TEMPLATE, METHOD FOR FORMING PATTERN, OPTICAL CLEANING APPARATUS AND NANOIMPRINT APPARATUS

摘要

Provided are a template cleaning method and an optical cleaning device capable of removing resist transfer which exists in the pattern surface of a template; a pattern forming method capable of forming a low defective pattern, and a nanoimprint device. The template cleaning method performs optical cleaning for the pattern surface of the template used for the nanoimprint and comprises a vacuum ultraviolet light irradiation process which irradiates the pattern surface of the template with vacuum ultraviolet light. [Reference numerals] (AA) Dried air