发明名称 PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC MIRROR ELEMENT USING THE SAME, AND ELECTRONIC APPARATUS USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which has a large deformation amount, and to provide a piezoelectric mirror element and an electronic apparatus which use the piezoelectric actuator.SOLUTION: A piezoelectric actuator includes: a conductive support plate 3; and a piezoelectric element 4 having a plate shape and including an electrode 4c, which is formed by sintered conductive particles, on at least one main surface. The support plate 3 is adhered to a main surface of the piezoelectric element 4, which is located at the side where the electrode 4c is provided, by an adhesive layer 8. A part of the conductive particles (4c-1) penetrates through the adhesive layer 8 and electrically connects the electrode 4c with the support plate 3.
申请公布号 JP2013251373(A) 申请公布日期 2013.12.12
申请号 JP20120124475 申请日期 2012.05.31
申请人 KYOCERA CORP 发明人 YUU YOSHIHIRO
分类号 H01L41/09;G02B26/08;G02B26/10;H01L41/187;H01L41/22 主分类号 H01L41/09
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