SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND DISPLAY METHOD AND DISPLAY PROGRAM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus and a semiconductor device manufacturing method, which can clearly differentiate a normal wafer and a defective wafer to prevent confusion of the normal wafer and the defective wafer by displaying not only whether each wafer is processed or unprocessed but displaying whether processing is terminated normally; and allow an operator to reliably mount a wafer cassette by displaying existence and non-existence of the wafer cassette.SOLUTION: A semiconductor manufacturing apparatus comprises: a cassette chamber 5 for storing at least a cassette; a process chamber for performing processing; a transfer chamber 7 for transferring a wafer in the cassette to the process chamber 6; and a display part 17. The display part 17 includes a display area 8 for displaying existence or non-existence of the cassette by drawing an image of the semiconductor manufacturing apparatus in plan view, and whether the cassette exists in the cassette chamber is displayed in the display area 8.