| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem of a conventional image evaluation method that only the blur quantity under specific observation conditions or the blur quantity when a specific sample is observed can be obtained, and the blur quantity dependent on the observation conditions or the sample cannot be obtained correctly for desired observation conditions or sample, and to evaluate the blur quantity of an image correctly even when an arbitrary sample is observed under arbitrary observation conditions.SOLUTION: The scanning electron microscope includes an arithmetic unit which determines the blur quantity of an image picked up with a second magnification, by comparing the frequency characteristics of images picked up, respectively, with a first magnification and the second magnification higher than the first magnification. |
