| 发明名称 |
SUPPORT FOR SEMICONDUCTOR SUBSTRATE |
| 摘要 |
A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself. |
| 申请公布号 |
US2013330154(A1) |
申请公布日期 |
2013.12.12 |
| 申请号 |
US201113825769 |
申请日期 |
2011.09.26 |
| 申请人 |
SOWDEN RALPH;BARR KEVIN;LABERGE MATTHEW;PALM TROY;BENSON DENNIS |
发明人 |
SOWDEN RALPH;BARR KEVIN;LABERGE MATTHEW;PALM TROY;BENSON DENNIS |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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