| 摘要 |
A coherent mixer includes a substrate including a principal surface, the principal surface having a first area and a second area; a multi-mode interference device provided on the first area of the substrate; a light-receiving device provided on the second area of the substrate, the light-receiving device including a plurality of waveguide-type photodiodes; a first input waveguide optically coupled to the multi-mode interference device; a second input waveguide optically coupled to the multi-mode interference device; a plurality of optical waveguides optically coupling the multi-mode interference device to the plurality of waveguide-type photodiodes; and a protective layer covering the first and second areas of the substrate, the protective layer covering the plurality of waveguide-type photodiodes. The protective layer has an opening in the first area of the substrate. In addition, the multi-mode interference device has a surface that is at least partially exposed at the opening of the protective layer. |
