| 摘要 |
A method of loading a flexible substrate (38), a device manufacturing method, an apparatus for loading a flexible substrate, and a lithography apparatus. According to an embodiment, there is provided a method of loading a flexible substrate onto a support (42) for use in an exposure apparatus, including transferring the substrate progressively from a substrate carrier (40) to the support in a way that a boundary line (45) separating a region of the substrate that is loaded onto the support and a region of the substrate that is not yet loaded onto the support remains substantially straight during the loading process. |
