| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability by easily measuring a surface profile of an object and removing data components such as disturbance vibration and surface roughness from measurement data.SOLUTION: An object 9 is held with a holder 13. While the object 9 is repeatedly reciprocated a plurality of times, relative to an irradiation section 35 in a scanning direction x by moving means 40, a surface profile is optically measured by measuring means 30 to acquire repetitive measurement data. Extraction means 33 tries to extract a data component of a prescribed frequency in the repetitive measurement data. |
