| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of highly accurately detecting breaking of a filament.SOLUTION: An X-ray inspection apparatus 1 includes: an X-ray tube 12 having plural filaments, a first filament 71 and a second filament 72, in a cathode; an X-ray tube current detector 76 for detecting current flowing from the cathode to an anode of the X-ray tube 12 as X-ray tube current; and a controller 46 for determining breaking of any of the first filament 71 and the second filament 72 on the basis of the X-ray tube current detected by the X-ray tube current detector 76 when voltage is applied from the cathode to the anode of the X-ray tube 12. |
