发明名称 PHOTORESIST COMPOSITION
摘要 A photoresist composition comprising: a resin which shows an increase in solubility in an aqueous alkali solution by an action of an acid; an acid generator; a plasticizer; and a solvent the amount of which is from 40 to 75% by mass of the total amount of the photoresist composition.
申请公布号 US2013330669(A1) 申请公布日期 2013.12.12
申请号 US201313910638 申请日期 2013.06.05
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 KAWAMURA MAKI;NAKANISHI JUNJI
分类号 G03F7/004;G03F7/20 主分类号 G03F7/004
代理机构 代理人
主权项
地址