发明名称 ARC EVAPORATION SOURCE
摘要 An arc evaporation source (101) according to one embodiment of the present invention comprises: a ring-shaped circumferential magnet (103) which is so arranged as to surround the outer circumference of a target (102) along a direction in which the direction of magnetization becomes parallel with the front surface of the target; and a rear surface magnet (104) which is arranged on the rear surface side of the target (102) along a direction in which the direction of magnetization becomes perpendicular to the front surface of the target. The magnetic pole of the circumferential magnet (103) on the inner side in the radial direction and the magnetic pole of the rear surface magnet (104) on the target (102) side have the same polarity as each other.
申请公布号 US2013327642(A1) 申请公布日期 2013.12.12
申请号 US201214001315 申请日期 2012.02.23
申请人 TANIFUJI SHINICHI;YAMAMOTO KENJI;KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) 发明人 TANIFUJI SHINICHI;YAMAMOTO KENJI
分类号 C23C14/24 主分类号 C23C14/24
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