发明名称 |
Lamella creation method and device using fixed-angle beam and rotating sample stage |
摘要 |
A system for creating a substantially planar face in a substrate, the system including directing one or more beams at a first surface of a substrate to remove material from a first location, the beam being offset from a normal to the first surface by a curtaining angle; sweeping the one or more beams in a plane that is perpendicular to the first surface to mill one or more initial cuts, the initial cuts exposing a second surface that is substantially perpendicular to the first surface; rotating the substrate about an axis other than an axis normal to the first beam or parallel to the first beam; directing the first beam at the second surface to remove additional material from the substrate without changing the curtaining angle; and scanning the one or more beams in across the second surface to mill one or more finishing cuts. |
申请公布号 |
US2013328246(A1) |
申请公布日期 |
2013.12.12 |
申请号 |
US201213493735 |
申请日期 |
2012.06.11 |
申请人 |
WELLS ANDREW B.;PARKER N. WILLIAM;CHANDLER CLIVE D.;UTLAUT MARK W.;FEI COMPANY |
发明人 |
WELLS ANDREW B.;PARKER N. WILLIAM;CHANDLER CLIVE D.;UTLAUT MARK W. |
分类号 |
H01J37/26;H01J37/20 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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